Conference Chair
We commemorate Mitch Taylor, who left us before the conference could take place.
Conference Co-Chair
Susan Felch, Susan Felch Consulting
Technical Program Co-Chairs
Susan Felch, Susan Felch Consulting
Larry Larson, Texas State University
Sponsorships Chair
Aaron Vanderpool, Intel Corporation
Annealing Program Chair
Wilfried Lerch, SkyLark Solutions
Proceedings Chair
Larry Larson, Texas State University
Chair: Susan Felch, Susan Felch Consulting
Shaoyin Chen, Ultratech/Veeco
Paul Chu, City University of Hong Kong
Alain Claverie, Centre d’Élaboration des Matériaux et d’Etudes Structurales (CEMES-CNRS)
Michael Current, Current Scientific
Ray Duffy, Tyndall National Institute
Volker Häublein, Fraunhofer IISB
Kevin Jones, University of Florida
Fareen Khaja, Veeco
Larry Larson, Texas State University
Wilfried Lerch, SkyLark Solutions
Jiro Matsuo, Kyoto University
Victor Moroz, Synopsys
Juergen Niess, HQ-Dielectrics GmbH
Deven Raj, Applied Materials, Inc.
Leonard Rubin, Axcelis Technologies
Werner Schustereder, Infineon Technologies
Ed Seebauer, University of Illinois at Urbana-Champaign
Kyoichi Suguro, Sugsol Corporation
Paul Timans, Thermal Process Solutions Ltd.
Frank Torregrosa, Ion Beam Services
Wilfried Vandervorst, imec
Chair: Kevin Jones, University of Florida, USA
David Chen, Advanced Ion Beam Technology, Inc, Taiwan
John Chen, Kingstone Semiconductor, China
Paul Chu, City University of Hong Kong, Hong Kong
Michael Current, Current Scientific, USA
Susan Felch, Susan Felch Consulting, USA
Nariaki Hamamoto, Nissin Ion Equipment Co., Ltd., Japan
Volker Häublein, Fraunhofer IISB, Germany
Amitabh Jain, Leonardo DRS, USA
Masataka Kase, Socionext, Japan
Yoji Kawasaki, Sumitomo Heavy Industries Ion Technology Co., Ltd., Japan
Larry Larson, Texas State University, USA
Wen-Hsi Lee, National Cheng Kung University, Taiwan
Jiro Matsuo, Kyoto University, Japan
Dirk Mous, High Voltage Engineering Europa BV, Netherlands
Lourdes Pelaz, University of Valladolid, Spain
Deven Raj, Applied Materials, Inc.
Leonard Rubin, Axcelis Technologies, USA
Geoffrey Ryding, Neutron Therapeutics, USA
Heiner Ryssel, Fraunhofer IISB, Germany
Werner Schustereder, Infineon Technologies, Austria
Mikio Takai, Osaka University (emeritus), Japan
Aaron Vanderpool, Intel Corporation, USA
Anatoli Vyatkin, Russian Academy of Sciences, Russia
Andrew Wittkower, (retired) USA
Isao Yamada, Kyoto University (emeritus), Japan
James Ziegler, U.S. Naval Academy (retired), USA